2

Tantalum and Tantalum Nitride as Diffusion Barriers Between Copper and Silicon

Year:
1990
Language:
english
File:
PDF, 1.25 MB
english, 1990
4

Tantalum as a diffusion barrier between copper and silicon

Year:
1990
Language:
english
File:
PDF, 562 KB
english, 1990
38

Morphology and Deposition Conditions of CVD Au Films

Year:
1990
Language:
english
File:
PDF, 3.05 MB
english, 1990